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High-quality InN films on MgO (100) substrates: the key role of 30 degrees in-plane rotation
VICENTE DAMIAN COMPEAN GARCIA
IGNACIO EVERARDO OROZCO HINOSTROZA
ARTURO ESCOBOSA ECHAVARRIA
EDGAR LOPEZ LUNA
ANGEL GABRIEL RODRIGUEZ VAZQUEZ
Acceso Abierto
Atribución-NoComercial-SinDerivadas
https://doi.org/10.1063/1.4876760
"High crystalline layers of InN were grown on MgO(100) substrates by gas source molecular beam epitaxy. Good quality films were obtained by means of an in-plane rotation process induced by the annealing of an InN buffer layer to minimize the misfit between InN and MgO. In situ reflection high-energy electron diffraction showed linear streaky patterns along the [01 (1) over bar0] azimuth and a superimposed diffraction along the [11 (2) over bar0] azimuth, which correspond to a 30 degrees alpha-InN film rotation. This rotation reduces the mismatch at the MgO/InN interface from 19.5% to less than 3.5%, increasing the structural quality, which was analyzed by high-resolution X-ray diffraction and Raman spectroscopy. Only the (0002) c plane diffraction of a-InN was observed and was centered at 2 theta = 31.4 degrees. Raman spectroscopy showed two modes corresponding to the hexagonal phase: E1(LO) at 591 cm(-1) and E2(high) at 488 cm(-1). Hall effect measurements showed a carrier density of 9 x 10(18) cm(-3) and an electron Hall mobility of 340 cm (2)/(V s) for a film thickness of 140 nm."
American Institute of Physics
2014-05
Artículo
Inglés
Público en general
V. D. Compeán García, et al.. Applied Physics Letters 104, 191904 (2014); https://doi.org/10.1063/1.4876760 © 2014 AIP Publishing LLC.
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Aparece en las colecciones: Publicaciones Científicas Nanociencias y Materiales

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